Ion-beam Assisted Sputtering of Titanium Nitride Thin Films Timothy Draher12 Tomas Polakovic3 Juliang Li4 Yi Li1 Ulrich Welp1 Jidong Samuel
Ion-beamAssistedSputteringofTitaniumNitrideThinFilmsTimothyDraher1,2,TomasPolakovic3,JuliangLi4,YiLi1,UlrichWelp1,JidongSamuelJiang1,JohnPearson1,WhitneyArmstrong3,Zein-EddineMeziani3,ClarenceChang4,Wai-KwongKwok1,ZhiliXiao1,2,andValentineNovosad1,*1ArgonneNationalLaboratory,MaterialsScienceDivision...
2025-05-03
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