Effective Mg Incorporation in CdMgO Alloy on Quartz Substrate Grown by Plasma -assisted MBE A. Adhikari1 A. Wierzbicka1 A. Lysak1 P. Sybilski1 B. S. Witkowski1 and E . Przezdziecka1

2025-05-03 0 0 1.55MB 22 页 10玖币
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Effective Mg Incorporation in CdMgO Alloy on Quartz Substrate
Grown by Plasma-assisted MBE
A. Adhikari*,1, A. Wierzbicka1, A. Lysak1, P. Sybilski1, B. S. Witkowski1, and E. Przezdziecka1
1Institute of Physics, Polish Academy of Sciences, Al. Lotnikow 32/46, Warsaw, Poland, 02-668
Email: adhikari@ifpan.edu.pl
Abstract
The development of CdMgO ternary alloy with a single cubic phase is challenging but meaningful
work for technological advancement. In this work, we have grown a series of Cd1-xMgxO ternary
random alloys with various Mg concentrations (x = 0, 30, 32, 45, and 55%) on quartz substrate by
plasma-assisted molecular beam epitaxy (PA-MBE) technique. The structural investigations of
alloys were performed using the X-ray diffraction (XRD) technique. The decreases in average
crystallite size and lattice parameters were observed with an increase in Mg content in the alloys.
XRD analysis confirms a single cubic phase is obtained for alloy compositions. The elemental and
morphological studies were carried out using energy dispersive x-ray (EDX) spectroscopy and
atomic force microscope (AFM) technique, respectively. The optical investigation was carried out
using UV-Vis spectroscopy. The optical bandgaps were estimated using the Tauc relation and it
was varied from 2.34 eV to 3.47 eV by varying the Mg content from zero to 55% in the alloys.
The Urbach energy increases from 112 meV to 350 meV which suggests a more disordered
localized state with an increase in Mg incorporation in the alloys.
Keywords: oxides, ternary alloys, molecular beam epitaxy, urbach energy
1. Introduction
The oxide semiconductors have gained more attention among the other semiconductor
materials because of their potential applications in optoelectronic industries like flat panel displays
(FPDs) [1], thin-film transistors (TFTs) [2], photodetectors [3,4], LEDs [5], sensors [6,7], etc.
Metal oxide semiconductors that have a large bandgap energy value, have a better tolerance against
high voltage. Apart from that, these are relatively stable in an atmospheric environment which can
make use of the fabrication process easy [8]. Among the oxide semiconductors, group-II oxides
receive increasing interest as they share similar features with group-III nitrides which could be
very promising for semiconductor industries. From the early 90’s research on wurtzite ZnO as an
alternative to the GaN system has started and still is going on because of its wide direct band gap
of 3.37 eV and large exciton binding energy of 60 meV which is higher than in GaN (binding
energy 25 meV) [9]. The rise in research not only about the basic properties of ZnO but also on
the related group II-VI semiconductor oxides like MgO and CdO which can be combined to form
heteroepitaxial device structure. The large bandgap tunability, stable structure, and ease of
fabrication process make the ZnO-CdO-MgO system a possible alternative to nitrides [10].
Among these metal-semiconductor oxides, CdO is considered to be a promising material
for photovoltaic applications due to its unique features like stable cubic rock-salt (RS) structure,
high transparency, high exciton binding energy of 75 meV, a high dielectric constant of 21.9, and
high electron mobility of 180 cm2V-1s-1 [11]. However, a relatively small direct bandgap of 2.3 eV
along with two indirect bandgaps of 1.2 eV and 0.8 eV [12] at room temperature is a key problem
that restricts its uses in a shorter wavelength regime. On the other hand, MgO is a direct bandgap
(7.5 eV) material with a high exciton binding energy of 80 meV [13] that crystallizes in the cubic
rocksalt structure. Thus, MgO can be combined with CdO by the meaning of alloying to form
various heterostructures such as ternary alloys, CdO/MgO superlattice structures (SLs), etc. which
can be useful for a variety of optoelectronic devices over a wide spectral range. Previously Chen
et al. [14] studied the change in the electronic structure of CdMgO alloys on glass substrates
prepared by radio frequency magnetron sputtering technique. Guia et al. studied Mg-rich to Cd-
rich CdMgO alloys on a sapphire substrate prepared by the metal-organic chemical vapor
deposition (MOCVD) technique and reported a phase separation at Cd concentration above 27%
[15,16]. Przezdziecka et al. studied quasi alloys short-period {CdO/MgO} SLs grown on sapphire
substrate by plasma-assisted molecular beam epitaxy (PA-MBE) technique and found out that the
bandgap of SLs can be varied from 2.6 eV to 6 eV by changing the CdO sublayer thick-ness at a
constant MgO layer thickness [17,18]. Recently, Adhikari et al. reported CdxMg1-xO ternary alloys
on m- and c-plane sapphire substrate grown by PA-MBE technique. They have found that the
direct bandgap can be varied from 2.42 eV to 5.5 eV by changing Mg content from 0 to 96% [19].
For the design of optoelectronic devices, optical coatings, and the manufacture of solar
cells, a limited number of suitable materials are available. Few theoretical articles have been
reported in recent years that indicate the possible tunability of the energy band gap of CdMgO and
stability of the cubic rock-salt structure across a full range of magnesium which can prove useful
from a practical point of view [20]. The development of new oxide-based devices requires
improving our knowledge about ternary alloys like CdMgO. Previously, there have been some
studies for quasi-ternary alloys based on ZnO/MgO [21,22] and ZnO/CdO [23,24] structures where
composition inhomogeneity can be overcome by growing superlattice structures. However, there
is still limited work being carried out on CdO-MgO alloys [2527]. In this paper, we have exploited
CdMgO layers deposited on quartz substrate by plasma-assisted MBE technique. In particular, in
the MBE method obtained layers are hydrogen-free. In distinguishing from other methods e.g.:
MOCVD where metalorganic precursors are the source of the hydrogen and carbon contamination
in the samples, the number of contaminations in the MBE method is low. Both the substrates and
the growth method influence the crystallographic and optoelectrical parameters of the
semiconductors [2830]. In particular, crystalline substrates can impose a preferential layer
orientation, as it was observed for CdMgO layers on differently oriented sapphire substrates [19].
It is, therefore, reasonable to characterize CdMgO samples obtained by different methods grown
on different substrates including amorphous substrates. We have chosen the quartz substrate as a
cheaper alternative to the sapphire substrate for our study. Moreover, the amorphous substrate does
not dictate preferential orientation in CdMgO films by the orientation of the substrate. The forced
orientation on amorphous substrates is related only to the thermodynamics of growth.
Simultaneously, the use of a transparent quartz substrate allows for a relatively easy study of the
energy gap of the layers by the optical transmission method. The Mg content in the alloys was
varied by changing the growth condition e.g.: Mg and Cd fluxes ratio. Structural, morphological,
and optical investigations of these samples were carried out in order to deeper characterize CdMgO
ternary material.
2. Experimental Methods
A Riber Compact 21B MBE system equipped with Mg and Cd effusion cells, and
radiofrequency oxygen plasma cells were used to grow CdMgO random alloys on a quartz
substrate. As the sources, Mg (6N purity, from PUREMAT technologies) and Cd (6N purity, from
JX Nippon Mining & Metal Corporation) ingots were used. The substrates were cleaned with
acetone and next with isopropanol for 20 minutes followed by deionized water in order to remove
organic contaminations and next dried with pure 5N N2 gas. During the growth process, the Cd
and Mg fluxes were controlled by varying the effusion cell's temperatures. The temperature of the
Cd effusion cell was fixed at 380oC whereas, the Mg effusion cell temperature was varied from
TMg= 500oC, 510oC, 520oC, and 530oC for samples S2 to S4 respectively. The growth process was
carried out at 360oC measured by thermocouple with a constant oxygen flow of 2.5 ml/min at a
fixed 400 W radio frequency power of the oxygen plasma.
The structural investigations of these ternary alloys were performed using a PANalytical
X’Pert Pro MRD, X-ray diffraction technique. Cu anode used for CuKα1 radiation of 1.5406Å
wavelength. The diffractometer is equipped with a Ge analyzer and a 2-bounce Ge (200) hybrid
monochromator. Elemental compositions in the alloys were investigated using a Hitachi SU-70
scanning electron microscope equipped with Thermo Scientific energy-dispersive X-ray (EDX)
spectrometer. The excitation energy was set at 6 keV, which allowed for effective excitation and
measurement of the composition of magnesium and cadmium, and at the same time minimized the
generation of a signal from the substrate that could disturb the measurement. The change in growth
parameter (i.e., Mg effusion cell temperature) results in, different Mg content Cd1-xMgxO ternary
alloys. The surface morphology was studied using Atomic force microscopy (AFM) in tapping
mode (Bruker Dimension Icon model). The optical investigations of these alloys were performed
at room temperature using a Carry 5000 UV-Vis/NIR spectrophotometer equipped with a PbS
detector from Agilent Technologies in a 200-600 nm wavelength range.
3. Results and Discussions
3.1. Structural property
Figure 1(a) shows the structural properties of CdMgO alloys on quartz substrate using X-
ray diffraction (XRD) scan over a range from 20o to 100o. XRD results confirmed that all the
samples were cubic rocksalt (RS) structures without any additional impurity phases. For pure CdO
(S1), the 111 and 200 diffraction peaks are identified from the diffraction angle at about 33o and
39o respectively-indicates the polycrystalline character of the structure. These identified reflections
are to originate from the cubic RS structure of CdO and are in good consistency with X-ray
diffraction JCPDF card no. 652908. Furthermore, there are no additional peaks observed co-related
to the quartz substrate in XRD analysis. XRD peak positions of pure CdO and MgO with the cubic
structure are marked with a dotted line in Fig. 1(a). A systematic shift of (111) and (200) diffraction
peaks towards a higher diffraction angle have been observed with an increase in Mg content in the
alloy (Fig. 1(b)). In case of layers obtained by pulsed laser deposition (PLD) technique on quartz,
the films grown at low-temperature show preferred orientation along (111) direction, while the
films grown at high temperature have preferred orientation along (200) direction [31]. The two
orientations 111 and 200 were reported in a temperature range of about 400ºC. Our analysis
indicated that preferential crystallographic orientation was also correlated with Mg concentration
in the alloy. The areal comparison of 111 and 200 diffraction peaks is shown in Fig. 1(c). Due to
the increase of the Mg content, the contribution from the 111 orientation increases compared to
200 orientation which reveals that the preferential orientation is strongly influenced by the Mg
content in the alloys. Previously, Adhikari et al. [19] reported the presence of double XRD peaks
in CdxMg1-xO film on m- and c-plane sapphire grown by plasma-assisted MBE technique. It was
evidence of the existence of regions with two different concentrations in the CdMgO ternary
layers. Their study suggested that both growth conditions and the orientation of substrates play an
important role in the homogeneity of the CdMgO layer. However, in this study, no such behavior
has been observed. It was observed that the FWHM of XRD CdMgO peaks on quartz substrates
are much higher than it was reported for sapphire substrates. The observed broadening of the
diffraction peak with an increase in Mg content in the alloy, clearly indicates that the incorporation
of Mg ion into the CdO lattice can be not fully homogenous. Moreover, the noisy diffraction peak
suggests the not-so-good crystallinity of the prepared alloy on the quartz substrate compared to
previously studied samples on sapphire substrates [19].
摘要:

EffectiveMgIncorporationinCdMgOAlloyonQuartzSubstrateGrownbyPlasma-assistedMBEA.Adhikari*,1,A.Wierzbicka1,A.Lysak1,P.Sybilski1,B.S.Witkowski1,andE.Przezdziecka11InstituteofPhysics,PolishAcademyofSciences,Al.Lotnikow32/46,Warsaw,Poland,02-668Email:adhikari@ifpan.edu.plAbstractThedevelopmentofCdMgOter...

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