
4
fabrication processes SFQ5ee [34], transformers using Nb
microstrips M6aM4 with = 615 nm (signal trace on the layer
M6 above the ground plane M4) are the most convenient
because they are the closest to the layer of Josephson junctions.
Then, solving (14) gives the minimum cross section area
= 1.34∙10−2 µm2. Hence, the typical minimum linewidth
and the film thickness are ()
116 nm. At smaller cross
sections, the required transformer cannot be made because the
excitation current required to induce flux amplitude in the
transformer secondary would exceed the critical current of the
transformer primary wire. In reality, the coupling coefficient is
always less than 1. For a more realistic = 0.5,
= 2.18∙10−2 µm2 and ()
=148 nm.
The minimum linewidth following from the minimum cross
section area) determines the minimum possible coupling length
between the transformer primary and secondary, i.e., the
minimum possible size of the ac-powered cell along the ac
power transmission line. Existence of the minimum linewidth
and the minimum cell size is the first limit on scalability of ac-
powered superconductor electronics (AQFP, RQL, etc.) caused
by the finite superconducting critical current of the primary
wire in the ac and dc flux-biasing transformers. This limit can
be reached in a 90-nm technology node (90-nm linewidth).
Further reduction of the linewidth would not significantly
increase the density of superconductor integrated circuits using
ac powering of logic gates. This is our first conclusion.
In the following sections we will consider other limitations
on the cell height (in the y-direction perpendicular to the ac
power transmission line) and width. For specificity, we will use
the typical parameters of AQFPs, whereas the same arguments
and estimates apply to other types of ac-powered
superconductor logics.
B. Inductor and the Output Coupling Transformer
The length of the inductor in AQFP, is given by
=
=
, (15)
Here is inductance per unit length of inductor which may
differ from the per length inductance of the excitation
transformer secondary . The typical AQFP parameters are
= 50 µA and = 1.6, giving =10.53 pH. At
~1 pH/µm, is about 10 µm.
Inductor needs to be placed perpendicular to the
inductors and , forming a T-shape, in order to minimize
direct coupling of the ac excitation to the output. The aspect
ratio of this “T” in the typical AQFP cell (width to length ratio)
is 2
=1:4 because the ratio of the optimal parameters
=
is 1.6:0.2=8:1. The minimum possible area of the typical AQFP
is = 2=
if the area occupied by the
junctions , the transformer primary, and vias between the
inductors can be neglected. The AQFP maximum number
density is then
=
=
, (16)
where < 1 is the area filling factor.
Using the AQFP parameters in Fig. 1 and the maximum
expected value of magnetic inductances =~1 pH/µm,
we get < 3.6∙106 cm−2. This is our second conclusion: the
number density of AQFPs using Nb inductors is limited from
above by three to four million AQFPs per cm2, corresponding
to about 1M cm−2 AQFP majority gates composed of three
(MAJ3) AQFPs.
This estimate does not account for possible limitations
imposed by the supercurrent-carrying capacity of the ac
transformer and for a possibility of using inductors with higher
values. Accounting for these factors does not change the
order of magnitude in the AQFP density estimate, but requires
a more detailed analysis.
The superconducting material and cross section of wires for
inductors and are selected such that both currents
(17a) and (17b) are smaller than the critical current of the
corresponding wires. For Nb wires with = 0.25 A/µm2, the
minimum cross section of is = 8∙10−4 µm2, which is an
order of magnitude smaller than following from (14) and
corresponds to wire dimensions ( )
~30 nm. This is the
ultimate limit to reduction of the linewidth of Nb wires.
Increasing values significantly above 1 pH/µm is
possible by using kinetic inductance (7). For instance, a 40-nm
thick Mo2N kinetic inductor in the SFQ5ee process [35] has
8
pH/µm (with is in micrometers) [36], which is
>>1 pH/µm at < 1 µm. However, a short strip of kinetic
inductor can be used only if is galvanically coupled to the
next AQFP (so-called directly coupled AQFP [38]). If inductive
(transformer) coupling to the next gate is required, the mutual
inductance between the short strip of a kinetic inductor and
the output inductor , which is proportional to the length of
, is going to be small. Careful optimization is needed in this
case, as will be discussed in Sec. III.
Consider inductive coupling with mutual inductance
between the and the output inductor connected to the
next AQFP or forming a part of the buffer which sums up the
output currents of three AQFPs comprising the majority
(MAJ3) gate [37]. Parametrically amplified input current
creates current
= 2
200 µA (17a)
in the , which in turn creates current
=
2 ()
(17b)
in the output inductor. The maximum value of can be
determined from the condition 10 µA, which is
the current required to drive the next AQFP. This gives
=19.63, (18a)
=.
. (18b)