
2
A different approach for measuring the DQD is real-
ized by probing a resonator coupled to the source contact
of a DQD [21–23]. This approach is further simplified by
connecting the resonator to a plunger gate, performing
gate-dispersive sensing [24]. This technique has enabled
measurements of the relaxation and dephasing times of
hole spins in a Ge/Si core/shell nanowire DQD using a
lumped-element resonator [25]. First attempts of cou-
pling Ge/Si nanowires to on-chip superconducting res-
onators were based on low-impedance resonators with a
weak charge-photon coupling and in a regime of many
holes present in the nanowire [26].
In this work, we extend the existing measurements
by coupling one of the two quantum dots to a high-
impedance superconducting resonator, see Fig. 1. The
used coupling scheme allows us to detect charging in the
other dot by means of capacitive charge sensing [27–30].
We map the charge-stability diagram using both, direct
current measurements and resonator spectroscopy. Fur-
thermore, we gate the nanowire to a regime of low hole
occupancy where no direct current through the nanowire
can be observed (pinch-off). In this regime, the resonator
spectroscopy signal reveals the presence of several more
holes in the investigated dot. Finally, by further increas-
ing the gate voltages, we find indications of the depletion
of the last hole in the investigated dot.
II. DEVICE DESCRIPTION
An overview of the device under investigation is shown
in Fig. 1a) and b). The device consists of a hybrid
resonator-nanowire architecture. A notch-type half-wave
(λ/2) resonator with a central frequency fr≈3.1 GHz
is defined in a NbTiN film of thickness ∼10 nm, cen-
ter conductor width of ∼370 nm and a distance between
center conductor and ground plane of ∼35 µm. The
resonator is capacitively coupled at a voltage anti-node
to a feedline which is used for resonator readout. At
the middle of the center conductor (voltage node), the
resonator is dc biased. In front of the dc bias pad, a
meandered inductor ensures sufficient frequency detun-
ing between the λ/2 mode and a second, quarter-wave
mode that forms due to the T-shaped section of the res-
onator. Thereby, microwave-leakage through the dc bias
line is reduced [31]. The resonator’s second voltage anti-
node is galvanically connected to one out of five bottom
gates. The bottom gates are fabricated by Ti/Pd sand-
wiched by ALD-grown HfO2and have a width of approx-
imately 25 nm. The gate pitch is 50 nm. On top of the
bottom gates a Ge/Si core/shell nanowire is determin-
istically placed using a micromanipulator, see Fig. 1 b).
All presented measurements are performed in a dilution
refrigerator at a base temperature of 35 mK.
The transmission S21 through the feedline in proximity
to the notch-type resonator as a function of frequency f
is given by [32, 33]
S21(f) = aeiαe−2πifτ h1−eiΦ/(1+Qc/Qloss )
1+2i(f/fr−1)/(1/Qc+1/Qloss )i,
where a,αand τaccount for the microwave propaga-
tion through the wiring in the cryostat and the resonance
is described by its resonance frequency fr, the coupling
quality factor Qcand the loss quality factor Qloss. The
term eiΦaccounts for the Fano shape of the observed res-
onance arising from impedance mismatches in the feed-
line coupled to the resonator [34].
We identify the resonance of the superconducting res-
onator at around 3.1 GHz by considering its tempera-
ture dependence. The measured transmission (phase
and magnitude) through the feedline around resonance is
shown on Fig. 1c). The signal is superimposed on a large
standing-wave background (see Fig. A.1 in the appendix.)
which we attribute to an impedance mismatch between
the feedline and the 50-Ohm environment of the cryostat.
Despite the large fluctuations in the transmission mag-
nitude, we are able to fit the phase of the transmission
(solid, blue curve in Fig. 1c) and extract the resonance
frequency fr= 3.111 GHz, and estimate the Q factors
Qc≈600 and Qloss ≈600. The uncertainity in these val-
ues originates from the large standing wave background.
We perform a finite-element simulation of the res-
onator using Sonnet and recover the resonance frequency
of the central mode of the resonator half-wave mode
when taking into account a sheet kinetic inductance of
70 pH/. Together with the stray line capacitance of
75 pF/m, this corresponds to a resonator impedance
of 1.6 kΩ, much larger than the standard 50 Ω, hence
improving the coupling strength between resonator and
double quantum dot [35, 36]. We attribute the rather low
Qloss to microwave leakage from the resonator to the dc
lines via capacitive coupling through the set of bottom
gates [37]. Indeed, using Sonnet, we estimate the mutual
capacitance between two neighbouring bottom gates to
be Cgg ≈800 aF. In future works, the mutual capacitance
can likely be decreased with an optimised gate geometry
and the resulting microwave leakage might be further re-
duced via improved filtering of the dc lines [31, 38].
III. CHARGE SENSING
Due to the Fermi level pinning stemming from the stag-
gered Si/Ge band-gap alignment, the Ge/Si core/shell
nanowire is a hole conductor. Therefore, by applying
positive gate voltages, we define the barrier potentials on
the gates g1, g3and g5. This gives rise to the confinement
potential of two quantum dots whose electrochemical po-
tentials are tuned by the gates g2and g4[39].
In the following, we investigate two different confine-
ment configurations. The first configuration is schemati-
cally depicted in Figure 2a). Here, two fairly symmetric
quantum dots, the left (L) and the right (R), are formed
between the gates g1 and g3 and between the gates g3
and g5. In this configuration, each dot couples to its re-
spective neighbors as shown on the sketch in Figure 2a).