Charge-sensing of a GeSi coreshell nanowire double quantum dot using a high-impedance superconducting resonator

2025-09-29 2 0 3.37MB 7 页 10玖币
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Charge-sensing of a Ge/Si core/shell nanowire double quantum dot using a
high-impedance superconducting resonator
J. H. Ungerer,1, 2, P. Chevalier Kwon,1, T. Patlatiuk,1J. Ridderbos,1, 3 A. Kononov,1
D. Sarmah,1E. P. A. M. Bakkers,4, 5 D. Zumb¨uhl,1, 2 and C. Sch¨onenberger1, 2,
1Department of Physics, University of Basel, Klingelbergstrasse 82 CH-4056, Switzerland
2Swiss Nanoscience Institute, University of Basel, Klingelbergstrasse 82 CH-4056, Switzerland
3MESA+ Institute for Nanotechnology, University of Twente,
P.O. Box 217, 7500 AE Enschede, The Netherlands
4Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
5Department of Applied Physics, TU Eindhoven,
Den Dolech 2, 5612 AZ Eindhoven, The Netherlands
(Dated: December 6, 2022)
Spin qubits in germanium are a promising contender for scalable quantum computers. Reading
out of the spin and charge configuration of quantum dots formed in Ge/Si core/shell nanowires is
typically performed by measuring the current through the nanowire. Here, we demonstrate a more
versatile approach on investigating the charge configuration of these quantum dots. We employ
a high-impedance, magnetic-field resilient superconducting resonator based on NbTiN and couple
it to a double quantum dot in a Ge/Si nanowire. This allows us to dispersively detect charging
effects, even in the regime where the nanowire is fully pinched off and no direct current is present.
Furthermore, by increasing the electro-chemical potential far beyond the nanowire pinch-off, we
observe indications for depleting the last hole in the quantum dot by using the second quantum dot
as a charge sensor. This work opens the door for dispersive readout and future spin-photon coupling
in this system.
I. INTRODUCTION
The interest in group-IV semiconductor spin qubits
is large because of their small footprint, a low concen-
tration of nuclear spins and available knowledge about
their production in semiconductor industry [1–5]. By
integrating on-chip superconducting resonators, strong
spin-photon coupling has been demonstrated for spins
of confined electrons in a Si two-dimensional electron
gas [6, 7]. Hole spins may offer the additional advan-
tages of improved relaxation and decoherence times as
they lack a valley degeneracy and exhibit a reduced wave-
function overlap with nuclear spins [8, 9]. Especially,
holes in one-dimensional Si or Ge nanowires [10–12] are
of a special interest because they posses strong spin-orbit
interaction [13–15]. The spin-orbit interaction poten-
tially simplifies qubit control and coupling to resonators
by electric-dipole spin resonance (EDSR) [16, 17]. It
thereby releases the need of implementing micromagnets
and hence facilitates scaling-up.
Recently, the coherent manipulation of a hole-spin
qubit in a gate-defined double quantum dot (DQD) in
a Ge/Si core/shell nanowire has been demonstrated [18].
However, in these experiments both the charge and the
spin-state of the double quantum dot were determined
by direct current measurements. This technique limits
the capability of determining the total number of holes
present in the nanowire. Furthermore, it requires long
These authors contributed equally to the work.
www.nanoelectronics.unibas.ch
integration times and severely limits the maximum cycle
length in pulsed-gate experiments.
Rather than measuring the current through the Ge/Si
core/shell nanowire double quantum dot, pioneering
works have employed another quantum dot to determine
changes in the charge-occupancy of the DQD and to per-
form spin readout [19, 20].
feedline
resonator
dc lines
100 nm
100 μm
a) b)
c)
FIG. 1. Device overview. a) Schematic of hybrid resonator
architecture. NbTiN is shown in dark blue, the Si substrate is
shown white. The feedline on the left is used for reading out
the notch-type coplanar-waveguide half-wave resonator which
is dc biased at its voltage node in the center. Additional dc
lines are used for sending current through the nanowire and
applying gate voltages on all bottom gates. b) False colored
scanning electron micrograph of a similar device with Ge/Si
nanowire lying on top of bottom gates covered with HfO2.
The gate colored red is connected to the resonator. c) Trans-
mission (phase and magnitude) through the feedline as a func-
tion of frequency close to the resonator frequency. The solid
blue curve indicates a fit from which we extract the resonance
frequency and estimate the quality factor (see main text).
arXiv:2211.00763v2 [cond-mat.mes-hall] 3 Dec 2022
2
A different approach for measuring the DQD is real-
ized by probing a resonator coupled to the source contact
of a DQD [21–23]. This approach is further simplified by
connecting the resonator to a plunger gate, performing
gate-dispersive sensing [24]. This technique has enabled
measurements of the relaxation and dephasing times of
hole spins in a Ge/Si core/shell nanowire DQD using a
lumped-element resonator [25]. First attempts of cou-
pling Ge/Si nanowires to on-chip superconducting res-
onators were based on low-impedance resonators with a
weak charge-photon coupling and in a regime of many
holes present in the nanowire [26].
In this work, we extend the existing measurements
by coupling one of the two quantum dots to a high-
impedance superconducting resonator, see Fig. 1. The
used coupling scheme allows us to detect charging in the
other dot by means of capacitive charge sensing [27–30].
We map the charge-stability diagram using both, direct
current measurements and resonator spectroscopy. Fur-
thermore, we gate the nanowire to a regime of low hole
occupancy where no direct current through the nanowire
can be observed (pinch-off). In this regime, the resonator
spectroscopy signal reveals the presence of several more
holes in the investigated dot. Finally, by further increas-
ing the gate voltages, we find indications of the depletion
of the last hole in the investigated dot.
II. DEVICE DESCRIPTION
An overview of the device under investigation is shown
in Fig. 1a) and b). The device consists of a hybrid
resonator-nanowire architecture. A notch-type half-wave
(λ/2) resonator with a central frequency fr3.1 GHz
is defined in a NbTiN film of thickness 10 nm, cen-
ter conductor width of 370 nm and a distance between
center conductor and ground plane of 35 µm. The
resonator is capacitively coupled at a voltage anti-node
to a feedline which is used for resonator readout. At
the middle of the center conductor (voltage node), the
resonator is dc biased. In front of the dc bias pad, a
meandered inductor ensures sufficient frequency detun-
ing between the λ/2 mode and a second, quarter-wave
mode that forms due to the T-shaped section of the res-
onator. Thereby, microwave-leakage through the dc bias
line is reduced [31]. The resonator’s second voltage anti-
node is galvanically connected to one out of five bottom
gates. The bottom gates are fabricated by Ti/Pd sand-
wiched by ALD-grown HfO2and have a width of approx-
imately 25 nm. The gate pitch is 50 nm. On top of the
bottom gates a Ge/Si core/shell nanowire is determin-
istically placed using a micromanipulator, see Fig. 1 b).
All presented measurements are performed in a dilution
refrigerator at a base temperature of 35 mK.
The transmission S21 through the feedline in proximity
to the notch-type resonator as a function of frequency f
is given by [32, 33]
S21(f) = aee2πifτ h1eiΦ/(1+Qc/Qloss )
1+2i(f/fr1)/(1/Qc+1/Qloss )i,
where a,αand τaccount for the microwave propaga-
tion through the wiring in the cryostat and the resonance
is described by its resonance frequency fr, the coupling
quality factor Qcand the loss quality factor Qloss. The
term eiΦaccounts for the Fano shape of the observed res-
onance arising from impedance mismatches in the feed-
line coupled to the resonator [34].
We identify the resonance of the superconducting res-
onator at around 3.1 GHz by considering its tempera-
ture dependence. The measured transmission (phase
and magnitude) through the feedline around resonance is
shown on Fig. 1c). The signal is superimposed on a large
standing-wave background (see Fig. A.1 in the appendix.)
which we attribute to an impedance mismatch between
the feedline and the 50-Ohm environment of the cryostat.
Despite the large fluctuations in the transmission mag-
nitude, we are able to fit the phase of the transmission
(solid, blue curve in Fig. 1c) and extract the resonance
frequency fr= 3.111 GHz, and estimate the Q factors
Qc600 and Qloss 600. The uncertainity in these val-
ues originates from the large standing wave background.
We perform a finite-element simulation of the res-
onator using Sonnet and recover the resonance frequency
of the central mode of the resonator half-wave mode
when taking into account a sheet kinetic inductance of
70 pH/. Together with the stray line capacitance of
75 pF/m, this corresponds to a resonator impedance
of 1.6 kΩ, much larger than the standard 50 Ω, hence
improving the coupling strength between resonator and
double quantum dot [35, 36]. We attribute the rather low
Qloss to microwave leakage from the resonator to the dc
lines via capacitive coupling through the set of bottom
gates [37]. Indeed, using Sonnet, we estimate the mutual
capacitance between two neighbouring bottom gates to
be Cgg 800 aF. In future works, the mutual capacitance
can likely be decreased with an optimised gate geometry
and the resulting microwave leakage might be further re-
duced via improved filtering of the dc lines [31, 38].
III. CHARGE SENSING
Due to the Fermi level pinning stemming from the stag-
gered Si/Ge band-gap alignment, the Ge/Si core/shell
nanowire is a hole conductor. Therefore, by applying
positive gate voltages, we define the barrier potentials on
the gates g1, g3and g5. This gives rise to the confinement
potential of two quantum dots whose electrochemical po-
tentials are tuned by the gates g2and g4[39].
In the following, we investigate two different confine-
ment configurations. The first configuration is schemati-
cally depicted in Figure 2a). Here, two fairly symmetric
quantum dots, the left (L) and the right (R), are formed
between the gates g1 and g3 and between the gates g3
and g5. In this configuration, each dot couples to its re-
spective neighbors as shown on the sketch in Figure 2a).
摘要:

Charge-sensingofaGe/Sicore/shellnanowiredoublequantumdotusingahigh-impedancesuperconductingresonatorJ.H.Ungerer,1,2,P.ChevalierKwon,1,T.Patlatiuk,1J.Ridderbos,1,3A.Kononov,1D.Sarmah,1E.P.A.M.Bakkers,4,5D.Zumbuhl,1,2andC.Schonenberger1,2,y1DepartmentofPhysics,UniversityofBasel,Klingelbergstrasse8...

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